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thyrcont圖拉特真空計(jì)VSI17D

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thyrcont圖拉特真空計(jì)VSI17DVSI17DVacuumTransducer●DN25KFThedigitalcoldcathodetransducerVSImeasuresabsolutepressureinthehighvacuumrange

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thyrcont圖拉特真空計(jì)VSI17D

VSI17D Vacuum Transducer ● DN25KF

Thyracont-Smartline-Vakuumtransmitter-VSM77D-3075-79-D-E.jpg

The digital cold cathode transducer VSI measures absolute pressure in the high vacuum range.
Its microcontroller intelligence allows for individual adjustment of sensor parameters to the application.

描述

Cathode sensor is controlled either automatically or manually by the user
Fast ignition due to a special technology
Insensitive against inrush of air due to automatic switch-off
Connector for protection class IP54 available
Easily replaceable sensor heads with stored calibration data
Digital and analog output signal / interfaces: 2.199 – 7.801 Volt, RS485
Output signal scalable according to required output characteristics for an easy replacement of existing transducers

應(yīng)用

Coating plants and vapor deposition
Industrial furnaces
Process engineering
Sputtering plants
Analytical instruments
Measuring and controlling in high vacuum

技術(shù)參數(shù)

WEIGHT	0.555 kg
DIMENSIONS	6.9 x 4.8 x 15.3 cm
MEASURING PRINCIPLE	Cold cathode ionization sensor (inverted magnetron), depending on gas type
MATERIALS IN CONTACT WITH VACUUM	Stainl. steel 1.4307, nickel, tungsten, molybdenum, glass, ceramic
MEASUREMENT RANGE	2e-3 – 5e-9 mbar (Torr), max. overpressure 10 bar abs.
ACCURACY	2e-3 mbar – 2e-8 mbar: < 25% from reading
REPEATABILITY	2e-3 – 2e-8 mbar: Approx. ±7% from reading
CATHODE VOLTAGE	Max. 2,5 kV
POWER SUPPLY	20 – 30 VDC
ELECTRICAL CONNECTION	D-Sub, 15-pin, male; optional: FCC68 (P_VSI003)
POWER CONSUMPTION	Max. 3 W, additionally 0.8 W f. EtherCAT / relays / LCD
OPERATING TEMPERATURE	+5…+60°C
STORAGE TEMPERATURE	-40…+65°C
MAX. BAKE OUT TEMPERATURE	160°C at flange (electronic detached)
OUTPUT SIGNAL	0 – 10 VDC, measuring range 1.819 – 8.6 VDC, log., 0.6 V/decade configurable; resistor > 10kOhm
SERIAL INTERFACE	RS485: 9.6 kBd to 115 kBd, address switch 1 – 16
SWITCH POINT	2 switch-over relays, 50 VAC / 2 A, 30 VDC / 2 A, max. 60 VA
VACUUM CONNECTION	DN 25 ISO-KF
PROTECTION CLASS	IP40, IP54 with counter plug – see accessories