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昆山熙日機械設(shè)備有限公司
昆山熙日機械設(shè)備有限公司
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聯(lián)系方式：張小姐,李先生查看聯(lián)系方式
更新時間：2022-11-26 12:48:34瀏覽次數(shù)：273次
聯(lián)系我時，請告知來自 智能制造網(wǎng)thyrcont圖拉特真空計VSI17EVSI17EVacuumTransducer●DN25KF●EtherCATThedigitalcoldcathodetransducerVSIwithEtherCATinterfacemeasuresabsolutepressureinthehighvacuumrange
thyrcont圖拉特真空計VSI17E 
The digital cold cathode transducer VSI with EtherCAT interface measures absolute pressure in the high vacuum range.
Its microcontroller intelligence allows for individual adjustment of sensor parameters to the application.
描述
Cathode sensor is controlled either automatically or manually by the user
Fast ignition due to a special technology
Insensitive against inrush of air due to automatic switch-off
Easily replaceable sensor heads with stored calibration data
Digital RS485 interface and EtherCAT
應(yīng)用
Coating plants and vapor deposition
Industrial furnaces
Process engineering
Analytical instruments
Sputtering plants
Measuring and controlling in high vacuum
技術(shù)參數(shù)
| WEIGHT | 0.555 kg |
|---|---|
| DIMENSIONS | 6.9 x 4.8 x 15.3 cm |
| MEASUREMENT RANGE | 2e-3 – 5e-9 mbar (Torr), max. overpressure 10 bar abs. |
| ACCURACY | 2e-3 mbar – 2e-8 mbar: < 25% from reading |
| CATHODE VOLTAGE | Max. 2,5 kV |
| ELECTRICAL CONNECTION | M12 circular connector, female, lockable, 1x A standard, 5pol., 2x D coded, 4pol. |
| POWER CONSUMPTION | Max. 3 W, additionally 0.8 W f. EtherCAT / relays / LCD |
| OPERATING TEMPERATURE | +5…+60°C |
| STORAGE TEMPERATURE | -40…+65°C |
| MAX. BAKE OUT TEMPERATURE | 160°C at flange (electronic detached) |
| SERIAL INTERFACE | RS485: 9.6 kBd to 115 kBd, address switch 1 – 16, EtherCAT |
| SWITCH POINT | not available |
| VACUUM CONNECTION | DN 25 ISO-KF |
| PROTECTION CLASS | IP54 |
vsie.pdf
man_vsi-de-171005.pdf
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