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thyrcont圖拉特真空計(jì)VSM77D

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thyrcont圖拉特真空計(jì)VSM77DVSM77DVacuumTransducer●DN25KFThedigitalcombinationtransducerVSM(Pirani/coldcathode)measuresabsolutepressurefromatmosphericpressuretoultrahighvacuum

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thyrcont圖拉特真空計(jì)VSM77D

Thyracont-Smartline-Vakuumtransmitter-VSM77DL-3075-79-DL.jpg

VSM77D Vacuum Transducer ● DN25KF

The digital combination transducer VSM (Pirani/cold cathode) measures absolute pressure from atmospheric pressure to ultrahigh vacuum.
The microcontroller intelligence of this vacuum gauge automatically manages the optional interplay of both vacuum sensors.

描述

Wide range sensor Pirani / cold cathode
Pirani with extended range allows operation of cold cathode at lower pressure and increases lifetime
Robust sensor design, insensitive against inrush of air
Digital RS485 interface and analog output signal 1.819-8.6 V
Automatic baud rate detection 9.6 kBd to 115 kBd
Two independent, potential-free relay switch points
Easily replaceable sensor heads with stored calibration data

應(yīng)用

Mass spectrometry
Coating plants and vapor deposition
Measuring and controlling in fine and ultrahigh vacuum
Process engineering
Sputtering plants
Vacuum furnaces

技術(shù)參數(shù)

WEIGHT	0.555 kg
DIMENSIONS	6.9 x 4.8 x 15.3 cm
MEASURING PRINCIPLE	Pirani / inverted magnetron, both depending on gas type
MATERIALS IN CONTACT WITH VACUUM	Stainl. steel 1.4307, nickel, tungsten, molybdenum, glass, ceramic
MEASUREMENT RANGE	1000 – 5e-9 mbar (750 – 5e-9 Torr), max. overpressure 10 bar abs.
ACCURACY	10 – 2e-3 mbar: <10 % from reading, 1000 - 10 mbar: <30 %from reading, 2e-3 mbar - 1e-8 mbar: <25% from reading
REPEATABILITY	10 – 1e-2 mbar: Approx.. ±2% from reading 1e-2 – 1e-8 mbar: Approx.. ±7% from reading
RESPONSE TIME	200 ms (1s for activating the cold cathode)
CATHODE VOLTAGE	Max. 2,5 kV
POWER SUPPLY	20 – 30 VDC
ELECTRICAL CONNECTION	SubD 15pol., male, lockable
POWER CONSUMPTION	Max. 3 W, additionally 0.8 W f. EtherCAT / relays / LCD
OPERATING TEMPERATURE	+5…+60°C
STORAGE TEMPERATURE	-40…+65°C
MAX. BAKE OUT TEMPERATURE	160°C at flange (electronic detached)
OUTPUT SIGNAL	0 – 10 VDC, measuring range 1.819 – 8.6 VDC, log., 0.6 V/decade load resistor > 10 kOhm
SERIAL INTERFACE	RS485: 9.6 kBd to 115 kBd, address switch 1 – 16
SWITCH POINT	2 switch-over relays, 50 VAC / 2 A, 30 VDC / 2 A, max. 60 VA
VACUUM CONNECTION	DN 25 ISO-KF
PROTECTION CLASS	IP40