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          昆山熙日機械設(shè)備有限公司
                                
                
                
          

							
          
                        			
          
		
          
	
          
	
	
          
		
          
            
          
                當(dāng)前位置：昆山熙日機械設(shè)備有限公司>>真空測量與檢測>>thyrcont圖拉特真空計VSM77DL
            
          
			
          
				
          
					
          thyrcont圖拉特真空計VSM77DL
          
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          thyrcont圖拉特真空計VSM77DL
          
				
          
				
          
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          QQ圖片20180107152039.pngthyrcont圖拉特真空計VSM77DL
          VSM77DL Vacuum Transducer ● DN25KF ● LCD display
          The digital combination vacuum transducer VSM (Pirani/cold cathode) with integrated display measures absolute pressure from atmospheric pressure to ultrahigh vacuum.
          Microcontroller intelligence automatically manages the optional interplay of both vacuum sensors. Smartline vacuum gauges represent cutting edge technology providing safe, precise and cost effective process control.
          描述
          • Wide range sensor Pirani / cold cathode
          • Pirani with extended range allows operation of cold cathode at lower pressure and increases lifetime
          • Robust sensor design, insensitive against inrush of air
          • Digital RS485 interface and analog output signal 1.819-8.6 V
          • Automatic baud rate detection 9.6 kBd to 115 kBd
          • Large, integrated LCD display with background illumination
          • Two independent, potential-free relay switch points
          • Easily replaceable sensor heads with stored calibration data
          應(yīng)用
          • Mass spectrometry
          • Coating plants and vapor deposition
          • Measuring and controlling in fine and ultrahigh vacuum
          • Process engineering
          • Sputtering plants
          • Vacuum furnaces
          技術(shù)參數(shù)
          WEIGHT0.555 kg
          DIMENSIONS6.9 x 4.8 x 15.3 cm
          MEASURING PRINCIPLE
          Pirani / inverted magnetron, both depending on gas type
          MATERIALS IN CONTACT WITH VACUUM
          Stainl. steel 1.4307, nickel, tungsten, molybdenum, glass, ceramic
          MEASUREMENT RANGE
          1000 – 5e-9 mbar (750 – 5e-9 Torr), max. overpressure 10 bar abs.
          ACCURACY
          10 – 2e-3 mbar: < 10 % from reading, 1000 – 10 mbar: < 30 % from reading, 2e-3 mbar – 1e-8 mbar: < 25% from reading
          REPEATABILITY
          10 – 1e-2 mbar: Approx.. ±2% from reading, 1e-2 – 1e-8 mbar: Approx.. ±7% from reading
          RESPONSE TIME
          200 ms (1s for activating the cold cathode)
          CATHODE VOLTAGE
          Max. 2,5 kV
          POWER SUPPLY
          20 – 30 VDC
          ELECTRICAL CONNECTION
          SubD 15pol., male, lockable
          POWER CONSUMPTION
          Max. 3 W, additionally 0.8 W f. EtherCAT / relays / LCD
          OPERATING TEMPERATURE
          +5…+60°C
          STORAGE TEMPERATURE
          -40…+65°C
          MAX. BAKE OUT TEMPERATURE
          160°C at flange (electronic detached)
          OUTPUT SIGNAL
          0 – 10 VDC, measuring range 1.819 – 8.6 VDC, log., 0.6 V/decade load resistor > 10 kOhm
          SERIAL INTERFACE
          RS485: 9.6 kBd to 115 kBd, address switch 1 – 16
          SWITCH POINT
          2 switch-over relays, 50 VAC / 2 A, 30 VDC / 2 A, max. 60 VA
          VACUUM CONNECTION
          DN 25 ISO-KF
          PROTECTION CLASS
          IP40
          vsme.pdf
          man_vsm-de-en-171005.pdf

               
			        
          
			    
          
                                                				
			
          
			
          
		
          
	
          
	
    
          
		
          
			
          
				
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