PLC 工控機(jī) 嵌入式系統(tǒng) 人機(jī)界面 工業(yè)以太網(wǎng) 現(xiàn)場(chǎng)總線 變頻器 機(jī)器視覺 DCS PAC/PLMC SCADA 工業(yè)軟件 ICS信息安全 應(yīng)用方案 無線通訊
昆山熙日機(jī)械設(shè)備有限公司
會(huì)員1.png)
昆山熙日機(jī)械設(shè)備有限公司
| 參 考 價(jià) | 面議 |
產(chǎn)品型號(hào)
品 牌
廠商性質(zhì)其他
所 在 地
聯(lián)系方式：張小姐,李先生查看聯(lián)系方式
更新時(shí)間：2022-11-26 12:25:37瀏覽次數(shù)：168次
聯(lián)系我時(shí)，請(qǐng)告知來自 智能制造網(wǎng)暫無信息 |
thyrcont圖拉特真空計(jì)VSM79E
thyrcont圖拉特真空計(jì)VSM79E 
The digital combination transducer VSM (Pirani/cold cathode) with EtherCAT interface measures absolute pressure from atmospheric pressure to ultrahigh vacuum.
Microcontroller intelligence automatically manages the optional interplay of both vacuum sensors. Smartline vacuum gauges represent cutting edge technology providing safe, precise and cost effective process control.
描述
Wide range sensor Pirani / cold cathode
Pirani with extended range allows operation of cold cathode at lower pressure and increases lifetime
Robust sensor design, insensitive against inrush of air
Digital RS485 interface and EtherCAT
Automatic baud rate detection 9.6 kBd to 115 kBd
Two independent, potential-free relay switch points
Easily replaceable sensor heads with stored calibration data
應(yīng)用
Mass spectrometry
Coating plants and vapor deposition
Measuring and controlling in fine and ultrahigh vacuum
Process engineering
Sputtering plants
Vacuum furnaces
技術(shù)參數(shù)
| WEIGHT | 0.555 kg |
|---|---|
| DIMENSIONS | 6.9 x 4.8 x 15.3 cm |
| MEASURING PRINCIPLE | Pirani / inverted magnetron, both depending on gas type |
| MATERIALS IN CONTACT WITH VACUUM | Stainl. steel 1.4307, nickel, tungsten, molybdenum, glass, ceramic |
| MEASUREMENT RANGE | 1000 – 5e-9 mbar (750 – 5e-9 Torr), max. overpressure 10 bar abs. |
| ACCURACY | 10 – 2e-3 mbar: < 10 % from reading, 1000 - 10 mbar: < 30 % from reading, 2e-3 mbar - 1e-8 mbar: < 25% from reading |
| REPEATABILITY | 10 – 1e-2 mbar: Approx.. ±2% from reading 1e-2 – 1e-8 mbar: Approx.. ±7% from reading |
| RESPONSE TIME | 200 ms (1s for activating the cold cathode) |
| CATHODE VOLTAGE | Max. 2,5 kV |
| POWER SUPPLY | 20 – 30 VDC |
| ELECTRICAL CONNECTION | M12 circular connector, female, lockable, 1x A standard, 5pol., 2x D coded, 4pol. |
| POWER CONSUMPTION | Max. 3 W, additionally 0.8 W f. EtherCAT / relays / LCD |
| OPERATING TEMPERATURE | +5…+60°C |
| STORAGE TEMPERATURE | -40…+65°C |
| MAX. BAKE OUT TEMPERATURE | 160°C at flange (electronic detached) |
| SERIAL INTERFACE | RS485: 9.6 kBd to 115 kBd, address switch 1 – 16 |
| SWITCH POINT | 2 switch-over relays, 50 VAC / 2 A, 30 VDC / 2 A, max. 60 VA |
| VACUUM CONNECTION | DN 40 CF-F |
| PROTECTION CLASS | IP54 |
vsme.pdf
man_vsm-de-en-171005.pdf
您感興趣的產(chǎn)品PRODUCTS YOU ARE INTERESTED IN
智能制造網(wǎng) 設(shè)計(jì)制作，未經(jīng)允許翻錄必究 .? ? ?
請(qǐng)輸入賬號(hào)
請(qǐng)輸入密碼
請(qǐng)輸驗(yàn)證碼
