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WaferMax Z 直驅(qū)升降平臺(tái) | 機(jī)械軸承直線電機(jī)直驅(qū)垂直升降平臺(tái) | 高精度垂直校準(zhǔn)平臺(tái) | WaferMax Z Mechanical-Bearing Direct-Drive Lif...

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公司名稱北京艾瑪特科技有限公司
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所在地北京市
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更新時(shí)間2025/2/18 8:01:06
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1.控制器2.驅(qū)動(dòng)器3.電機(jī)4.執(zhí)行器5.滑臺(tái)和直線單元6.高精密定位平臺(tái)7.減速機(jī)8.離合器和制動(dòng)器9.直線導(dǎo)軌10.絲杠11.直線軸承12.軸系13.精密滾珠14.測(cè)量反饋裝置15.教學(xué)設(shè)備16.機(jī)床

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The WaferMax Z represents a significant breakthrough in vertical alignment of high-precision components in one compact package. Its superior noncontact linear motor drive employs a high-accuracy encod......

WaferMax Z 直驅(qū)升降平臺(tái) | 機(jī)械軸承直線電機(jī)直驅(qū)垂直升降平臺(tái) | 高精度垂直校準(zhǔn)平臺(tái) | WaferMax Z Mechanical-Bearing Direct-Drive Lif... 產(chǎn)品信息

● 薄型設(shè)計(jì)，可用于空間敏感的應(yīng)用
● 非接觸直接驅(qū)動(dòng)
● 高重復(fù)定位精度
● 集成氣動(dòng)平衡(配重)

● 與WaferMax T 輕松配置多軸應(yīng)用

Superior Mechanical Design
Bearing elements are crossed-roller style for maximum smoothness and reliability. These are mounted on an optimized base and wedge assembly for stiffness and low mass/inertia, enhancing dynamic performance.

All the critical elements of the WaferMax Z were selected to operate in a 24/7 industrial environment and, unlike screw- or piezo-based vertical stages, the WaferMax Z requires no maintenance and will ensure years of trouble-free operation.

Brushless Direct-Drive
To maximize positioning performance, the WaferMax Z utilizes Aerotech’s BLMUC-series brushless, slotless linear motor. This motor has all of the advantages of a brushless direct-drive motor — no brushes to wear, no gear trains to maintain and high acceleration and high speeds. Since it is a slotless, ironless design, there is zero cogging, meaning that there is absolutely no torque ripple. This makes the WaferMax Z ideal for contoured motion, smooth scan velocity or precise incremental steps.

Accurate Positioning
Performance is assured with a precision linear encoder that results in 0.8 nm resolution. The motor and high-performance linear encoder are directly coupled to increase accuracy.

Flexible Configurations
Aerotech manufactures a wide range of servo amplifiers and advanced controllers to provide a complete, integrated package.

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