● Rugged construction
● Hard-coated tabletop and waycovers
● Optional high-accuracy, noncontact linear encoder
● Sealed design with optional air purge

Rugged Construction

The greatest attention to detail is evident in all aspects of the ATS5000 design. The tabletop utilizes stainless steel Helicoil™ inserts to protect mounting holes against thread wear. An integral metal waycover is provided to protect the stage from hot sparks or debris. Both the metal waycover and tabletop are treated with a hardcoat (Rockwell 62 hardness) that is scratch-resistant and provides outstanding protection in the harshest applications.

To further provide the stage with protection from a caustic environment, the ATS5000 utilizes Aerotech unique tensioned side-strap system. The straps are in a vertical orientation that prevents debris from accumulating on top of them and are tensioned to create a tight seal. An optional air-purge fitting is available that allows air to be forced into the body of the stage. This creates a positive pressure that prevents any particulate, no matter how fine, from entering the stage.

To aid in system assembly, the base mounting holes are located outboard of the stage. Therefore, the stage can be mounted without removing the hardcover.

High Performance

The base of the ATS5000 is machined from special aluminum alloy tooling plate to provide high stiffness and long-term stability. Sealed linear motion guide bearings with integral wipers are incorporated to provide excellent payload capability and long-life, even with heavy offset loads.

Noncontact linear encoders with submicron repeatabilities are available on all ATS5000 series stages. Optional HALAR and HALSF factory calibrations are available that further increase the standard accuracy, straightness and flatness specifications to even finer precision.

Motor and Drives
Included with all ATS5000 series stages is Aerotech high performance BM series brushless servomotor. Aerotech manufactures a wide range of matching drives and controls to provide a fully integrated and optimized solution. Optional brushless and slotless (BMS series), NEMA 34 DC brush and microstepping motors are also offered. For maximum performance, a linear motor version is available – please refer to the ALS5000.