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          北京艾瑪特科技有限公司銷售部
                                
                
                
          

							
          
                        			
          
		
          
	
          
	
	
          
		
          
            
			
          
				
          
					
          X-Y Planar Air Bearing System
          
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          所  在  地北京市
          
						
          
                        
                    
          
					 							        										
          聯(lián)系方式：王曉春查看聯(lián)系方式
          
									                                                 
          
						
          
							
          
								更新時間：2024-08-26 11:50:00瀏覽次數(shù)：93次
							
          
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          經(jīng)營模式：代理商
          
						
          商鋪產(chǎn)品：406條
          
						
          所在地區(qū)：北京北京市
          
						
          聯(lián)系人：王曉春 （銷售主管）
          												
					
          
				
          
			
          			
          
                                
          
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          X-Y Planar Air Bearing System
          
				
          
				
          
                    詳細(xì)介紹
                
          
			    
          
			        
          
			            
          Patent Pending X-Y Planar Motion System:
          ALIO has developed the next generation of nano-precision X-Y Planar system for Semiconductor, FPD and other application needing less than 1 arc second of pitch, yaw and roll with picometer resolution over large volumes. The ALIO team took a new approach to the next generation of equipment needed for the FPD and metrology markets. Larger glass for Gen 7, 8 and beyond in FPB the issues of maintaining high volume and high yields during process and inspection the need for a new mechanical design to eliminate mechanical beam thermals, bending and orthogonality position errors. The ALIO X-Y Planar system decouples and isolates the X and Y beam thermals, sage and alignment issues in a novel but simple kinematic design.
           
          The X-Y Planar system has an application dependant platen for open center or vacuum wafer chuck mounting.
          
			        
          
			    
          
                                                				
			
          
			
          
		
          
	
          
	
    
          
		
          
			
          
				
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